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US08642456B2 Implementing semiconductor signal-capable capacitors with deep trench and TSV technologies 失效
实现具有深沟槽和TSV技术的半导体信号电容器

Implementing semiconductor signal-capable capacitors with deep trench and TSV technologies
Abstract:
A method and structures are provided for implementing semiconductor signal-capable capacitors with deep trench and Through-Silicon-Via (TSV) technologies. A deep trench N-well structure is formed and an implant is provided in the deep trench N-well structure with a TSV formed in a semiconductor chip. At least one angled implant is created around the TSV in a semiconductor chip. The TSV is surrounded with a dielectric layer and filled with a conducting material which forms one electrode of the capacitor. A connection is made to one implant forming a second electrode to the capacitor.
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