Invention Grant
US08642456B2 Implementing semiconductor signal-capable capacitors with deep trench and TSV technologies
失效
实现具有深沟槽和TSV技术的半导体信号电容器
- Patent Title: Implementing semiconductor signal-capable capacitors with deep trench and TSV technologies
- Patent Title (中): 实现具有深沟槽和TSV技术的半导体信号电容器
-
Application No.: US13449480Application Date: 2012-04-18
-
Publication No.: US08642456B2Publication Date: 2014-02-04
- Inventor: Gerald K. Bartley , Philip R. Germann , John E. Sheets, II
- Applicant: Gerald K. Bartley , Philip R. Germann , John E. Sheets, II
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Joan Pennington
- Main IPC: H01L21/425
- IPC: H01L21/425

Abstract:
A method and structures are provided for implementing semiconductor signal-capable capacitors with deep trench and Through-Silicon-Via (TSV) technologies. A deep trench N-well structure is formed and an implant is provided in the deep trench N-well structure with a TSV formed in a semiconductor chip. At least one angled implant is created around the TSV in a semiconductor chip. The TSV is surrounded with a dielectric layer and filled with a conducting material which forms one electrode of the capacitor. A connection is made to one implant forming a second electrode to the capacitor.
Public/Granted literature
- US20130277798A1 Implementing Semiconductor Signal-Capable Capacitors with Deep Trench and TSV Technologies Public/Granted day:2013-10-24
Information query
IPC分类: