Invention Grant
US08642511B2 Method for depositing oxide thin films on textured and curved metal surfaces
失效
在纹理和弯曲金属表面上沉积氧化物薄膜的方法
- Patent Title: Method for depositing oxide thin films on textured and curved metal surfaces
- Patent Title (中): 在纹理和弯曲金属表面上沉积氧化物薄膜的方法
-
Application No.: US13139961Application Date: 2009-12-18
-
Publication No.: US08642511B2Publication Date: 2014-02-04
- Inventor: Philippe Odier , Stéphanie Morlens , Cyril Millon , Sarah Petit , Tristan Caroff , Carmen Jimenez , Jean-Louis Soubeyroux , Arnaud Allais , Mark Rikel
- Applicant: Philippe Odier , Stéphanie Morlens , Cyril Millon , Sarah Petit , Tristan Caroff , Carmen Jimenez , Jean-Louis Soubeyroux , Arnaud Allais , Mark Rikel
- Applicant Address: FR Paris Cedex
- Assignee: Centre National de la Recherche Scientifique
- Current Assignee: Centre National de la Recherche Scientifique
- Current Assignee Address: FR Paris Cedex
- Agency: McCarter & English, LLP
- Priority: FR0807113 20081218
- International Application: PCT/FR2009/001449 WO 20091218
- International Announcement: WO2010/076429 WO 20100708
- Main IPC: H01L39/24
- IPC: H01L39/24

Abstract:
Method of depositing a layer of oxide of at least one metal element on a curved surface of a textured metal substrate, said method comprising the following steps: (1) a layer of a precursor of at least one oxide of a metal is deposited using an organic solution of at least one precursor of said metal, this solution preferably having a viscosity, measured at the temperature of the method, of between 1 mPa s and 20 mPa s, and even more preferentially between 2 mPa s and 10 mPa s. (2) said layer of oxide precursor is left to dry, (3) heat treatment is carried out in order to pyrolyse said oxide precursor and to form the oxide, at least part of said heat treatment being carried out under a flow of reducing gas, said reducing gas preferably having a flow rate greater than 0.005 cm/s, preferentially between 0.012 cm/s and 0.1 cm/s, and even more preferentially between 0.04 cm/s and 0.08 cm/s.
Public/Granted literature
- US20120028810A1 METHOD FOR DEPOSITING OXIDE THIN FILMS ON TEXTURED AND CURVED METAL SURFACES Public/Granted day:2012-02-02
Information query
IPC分类: