Invention Grant
US08642917B2 Highly ordered structure pyrolitic graphite or carbon-carbon composite cathodes for plasma generation in carbon containing gases 有权
用于含碳气体中等离子体生成的高阶结构热解石墨或碳 - 碳复合阴极

Highly ordered structure pyrolitic graphite or carbon-carbon composite cathodes for plasma generation in carbon containing gases
Abstract:
A cathode electrode for plasma generation. The cathode is made of graphite with highly ordered structure such as Pyrolitic Graphite or Carbon-Carbon composites. Furthermore, carbon containing gases will be used as plasma gas. The cathode will allow for theoretically an unlimited lifetime of the cathode.
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