Invention Grant
- Patent Title: Wafer dividing apparatus and laser processing apparatus
- Patent Title (中): 晶圆分割装置和激光加工装置
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Application No.: US12968733Application Date: 2010-12-15
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Publication No.: US08642920B2Publication Date: 2014-02-04
- Inventor: Chikara Aikawa , Jun Abatake , Yasuyoshi Yubira , Hiroto Yoshida
- Applicant: Chikara Aikawa , Jun Abatake , Yasuyoshi Yubira , Hiroto Yoshida
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2009-287362 20091218
- Main IPC: B23K26/16
- IPC: B23K26/16 ; H01L21/00

Abstract:
A wafer dividing apparatus for dividing a wafer along a plurality of crossing streets in the condition where the wafer is attached to the upper surface of a dicing tape supported to an annular frame and the strength of the wafer is reduced along the streets. The wafer dividing apparatus includes a frame holding unit for holding the annular frame, a wafer holding table having a holding surface for holding the wafer through the dicing tape supported to the annular frame held by the frame holding unit, a tape expanding unit for relatively moving the frame holding unit and the wafer holding table in a direction perpendicular to the holding surface of the wafer holding table to thereby expand the dicing tape, and a vibration generating unit for applying vibration to the holding surface of the wafer holding table.
Public/Granted literature
- US20110147349A1 WAFER DIVIDING APPARATUS AND LASER PROCESSING APPARATUS Public/Granted day:2011-06-23
Information query
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