Invention Grant
- Patent Title: Non-volatile memory device
- Patent Title (中): 非易失性存储器件
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Application No.: US13588112Application Date: 2012-08-17
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Publication No.: US08642988B2Publication Date: 2014-02-04
- Inventor: Masaharu Kinoshita , Yoshitaka Sasago , Takashi Kobayashi , Hiroyuki Minemura
- Applicant: Masaharu Kinoshita , Yoshitaka Sasago , Takashi Kobayashi , Hiroyuki Minemura
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2011-209811 20110926
- Main IPC: H01L29/02
- IPC: H01L29/02

Abstract:
A non-volatile memory device includes: a first line extending along a main surface of a substrate; a stack provided above the first line; a second line formed above the stack; a select element provided where the first and second lines intersect, the select element adapted to pass current in a direction perpendicular to the main surface; a second insulator film provided along a side surface of the stack; a channel layer provided along the second insulator film; an adhesion layer provided along the channel layer; and a variable resistance material layer provided along the adhesion layer, wherein the first and second lines are electrically connected via the select element and channel layer, a contact resistance via the adhesion layer between the channel layer and variable resistance material layer is low, and a resistance of the adhesion layer is high with respect to an extending direction of the channel layer.
Public/Granted literature
- US20130075684A1 NON-VOLATILE MEMORY DEVICE Public/Granted day:2013-03-28
Information query
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