Invention Grant
- Patent Title: Structure of high-K metal gate semiconductor transistor
- Patent Title (中): 高K金属栅半导体晶体管的结构
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Application No.: US12908024Application Date: 2010-10-20
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Publication No.: US08643061B2Publication Date: 2014-02-04
- Inventor: Haizhou Yin , Dae-Gyu Park , Oleg Gluschenkov , Zhijiong Luo , Dominic Schepis , Jun Yuan
- Applicant: Haizhou Yin , Dae-Gyu Park , Oleg Gluschenkov , Zhijiong Luo , Dominic Schepis , Jun Yuan
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Yuanmin Cai
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A semiconductor structure is provided. The structure includes an n-type field-effect-transistor (NFET) being formed directly on top of a strained silicon layer, and a p-type field-effect-transistor (PFET) being formed on top of the same stained silicon layer but via a layer of silicon-germanium (SiGe). The strained silicon layer may be formed on top of a layer of insulating material or a silicon-germanium layer with graded Ge content variation. Furthermore, the NFET and PFET are formed next to each other and are separated by a shallow trench isolation (STI) formed inside the strained silicon layer. Methods of forming the semiconductor structure are also provided.
Public/Granted literature
- US20120098067A1 STRUCTURE OF HIGH-K METAL GATE SEMICONDUCTOR TRANSISTOR Public/Granted day:2012-04-26
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