Invention Grant
US08643085B2 High-voltage-resistant semiconductor component having vertically conductive semiconductor body areas and a trench structure 有权
具有垂直导电半导体主体区域和沟槽结构的耐高压半导体部件

  • Patent Title: High-voltage-resistant semiconductor component having vertically conductive semiconductor body areas and a trench structure
  • Patent Title (中): 具有垂直导电半导体主体区域和沟槽结构的耐高压半导体部件
  • Application No.: US11234585
    Application Date: 2005-09-23
  • Publication No.: US08643085B2
    Publication Date: 2014-02-04
  • Inventor: Frank Pfirsch
  • Applicant: Frank Pfirsch
  • Applicant Address: DE Neubiberg
  • Assignee: Infineon Technologies AG
  • Current Assignee: Infineon Technologies AG
  • Current Assignee Address: DE Neubiberg
  • Agency: Murphy, Bilak & Homiller, PLLC
  • Priority: DE102004046697 20040924
  • Main IPC: H01L29/66
  • IPC: H01L29/66
High-voltage-resistant semiconductor component having vertically conductive semiconductor body areas and a trench structure
Abstract:
A high-voltage-resistant semiconductor component (1) has vertically conductive semiconductor areas (17) and a trench structure (5). These vertically conductive semiconductor areas are formed from semiconductor body areas (10) of a first conductivity type and are surrounded by a trench structure (5) on the upper face (6) of the semiconductor component. For this purpose the trench structure has a base (7) and a wall area (8) and is filled with a material (9) with a relatively high dielectric constant (εr). The base area (7) of the trench structure (5) is provided with a heavily doped semiconductor material (11) of the same conductivity type as the lightly doped semiconductor body areas (17), and/or having a metallically conductive material (12).
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