Invention Grant
US08643128B2 Micro-electro-mechanical-system sensor and method for making same 有权
微机电系统传感器及其制作方法

Micro-electro-mechanical-system sensor and method for making same
Abstract:
The present invention discloses an MEMS sensor and a method for making the MEMS sensor. The MEMS sensor according to the present invention includes: a substrate including an opening; a suspended structure located above the opening; and an upper structure, a portion of which is at least partially separated from a portion of the suspended structure; wherein the suspended structure and the upper structure are separated from each other by a step including metal etch.
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