Invention Grant
- Patent Title: Micro-electro-mechanical-system sensor and method for making same
- Patent Title (中): 微机电系统传感器及其制作方法
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Application No.: US12391551Application Date: 2009-02-24
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Publication No.: US08643128B2Publication Date: 2014-02-04
- Inventor: Chuan Wei Wang
- Applicant: Chuan Wei Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Pixart Imaging Incorporation
- Current Assignee: Pixart Imaging Incorporation
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
The present invention discloses an MEMS sensor and a method for making the MEMS sensor. The MEMS sensor according to the present invention includes: a substrate including an opening; a suspended structure located above the opening; and an upper structure, a portion of which is at least partially separated from a portion of the suspended structure; wherein the suspended structure and the upper structure are separated from each other by a step including metal etch.
Public/Granted literature
- US20100213557A1 MICRO-ELECTRO-MECHANICAL-SYSTEM SENSOR AND METHOD FOR MAKING SAME Public/Granted day:2010-08-26
Information query
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