Invention Grant
- Patent Title: Thermal detector, thermal detection device, and electronic instrument
- Patent Title (中): 热探测器,热检测装置和电子仪器
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Application No.: US13399224Application Date: 2012-02-17
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Publication No.: US08643133B2Publication Date: 2014-02-04
- Inventor: Yasushi Tsuchiya
- Applicant: Yasushi Tsuchiya
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2011-036817 20110223
- Main IPC: H01L31/058
- IPC: H01L31/058

Abstract:
A thermal detector includes a substrate, a thermal detection element and a support member. The substrate has a recess part with a bottom surface of the recess part being a curved light-reflecting surface. The thermal detection element has a light-absorbing film. The support member supports the thermal detection element. The substrate and the support member are arranged to form a hollow part therebetween. The support member includes a light-absorbing part in which impurities are dispersed in polycrystalline silicon with the light-absorbing part being arranged in at least a part of a surface of the support member facing toward the hollow part so that the light-absorbing part being irradiated by light.
Public/Granted literature
- US20120211858A1 THERMAL DETECTOR, THERMAL DETECTION DEVICE, AND ELECTRONIC INSTRUMENT Public/Granted day:2012-08-23
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