Invention Grant
- Patent Title: Method for controlling ion energy in radio frequency plasmas
- Patent Title (中): 控制射频等离子体离子能量的方法
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Application No.: US12864123Application Date: 2008-07-11
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Publication No.: US08643280B2Publication Date: 2014-02-04
- Inventor: Brian George Heil , Uwe Czarnetzki , Ralf Peter Brinkmann , Thomas Mussenbrock
- Applicant: Brian George Heil , Uwe Czarnetzki , Ralf Peter Brinkmann , Thomas Mussenbrock
- Applicant Address: DE Bochum
- Assignee: Ruhr-Universität Bochum
- Current Assignee: Ruhr-Universität Bochum
- Current Assignee Address: DE Bochum
- International Application: PCT/EP2008/059133 WO 20080711
- International Announcement: WO2009/115135 WO 20090924
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H05B31/26 ; H01J13/48 ; H01J15/04 ; H01J17/36 ; H05B37/00 ; H05B39/00 ; H05B41/00
Abstract:
A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
Public/Granted literature
- US20110248634A1 METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS Public/Granted day:2011-10-13
Information query
