Invention Grant
- Patent Title: Signal generation system
- Patent Title (中): 信号发生系统
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Application No.: US13141938Application Date: 2009-12-22
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Publication No.: US08643281B2Publication Date: 2014-02-04
- Inventor: Andrew David York , Brian Halsall , Gregory Ian Chance
- Applicant: Andrew David York , Brian Halsall , Gregory Ian Chance
- Applicant Address: GB Oxfordshire
- Assignee: Oxford Instruments Nanotechnology Tools Limited
- Current Assignee: Oxford Instruments Nanotechnology Tools Limited
- Current Assignee Address: GB Oxfordshire
- Agency: Blank Rome LLP
- Priority: GB0823565.7 20081224
- International Application: PCT/GB2009/002935 WO 20091222
- International Announcement: WO2010/073006 WO 20100701
- Main IPC: H05H1/46
- IPC: H05H1/46 ; C23C16/00

Abstract:
A signal generating system comprises a signal generator (14) for generating an electrical signal at a predetermined frequency; an impedance matching circuit (16), the electrical signal being supplied from the signal generator (14) via the impedance matching circuit (16) to a reactive load (10) in use; and an impedance matching control system (30) for detecting the electrical signal between the signal generator and the reactive load and for adjusting the impedance matching circuit (16) to achieve a predetermined condition. The impedance matching circuit control system (30) comprises a heterodyne circuit, and the system further comprises a heterodyne frequency generator (48) coupled to the signal generator (14) to generate a second, heterodyne frequency from the predetermined frequency from the signal generator. This second, heterodyne frequency is mixed with the detected signal to generate sum and difference signals. A filter (50, 52) passes the difference signal and a processor (Magnitude control; Phase control; 26; 28) responsive to the difference signal is used to adjust the impedance matching circuit (16) to achieve the predetermined condition.
Public/Granted literature
- US20120074844A1 SIGNAL GENERATION SYSTEM Public/Granted day:2012-03-29
Information query
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