Invention Grant
- Patent Title: Measurement systems and methods
- Patent Title (中): 测量系统和方法
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Application No.: US13312423Application Date: 2011-12-06
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Publication No.: US08643849B2Publication Date: 2014-02-04
- Inventor: Li Tao , Guiju Song , Xinjun Wan , Kevin George Harding , Steven Robert Hayashi , James Joseph Hoffman , Charles Walter Muekmore , Yana Zhang Williams , Shukuan Xu
- Applicant: Li Tao , Guiju Song , Xinjun Wan , Kevin George Harding , Steven Robert Hayashi , James Joseph Hoffman , Charles Walter Muekmore , Yana Zhang Williams , Shukuan Xu
- Applicant Address: US NY Schenectady
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Schenectady
- Agency: Global Patent Operation
- Agent Peter T. DiMauro
- Priority: CN201010601226 20101210
- Main IPC: G02B11/24
- IPC: G02B11/24

Abstract:
A measurement system comprising a light source unit, a projection unit and an optics unit is disclosed. The light source unit is configured to generate a plurality of modulated phase shifted light beams. The projection unit is configured to reflect the modulated phase shifted light beams onto an object surface. The optics unit is configured to capture the modulated phase shifted light beams from the object surface. The measurement system further comprises a photodetector and a processor. The photodetector is configured to receive the modulated phase shifted light beams from the optics unit to generate electrical signals. The processor is configured to retrieve position information of the object surface based on the electrical signals from the photodetector. A measurement method is also presented.
Public/Granted literature
- US20120147383A1 MEASUREMENT SYSTEMS AND METHODS Public/Granted day:2012-06-14
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