Invention Grant
US08643937B2 Diffractive optical nano-electro-mechanical device with reduced driving voltage
有权
具有降低驱动电压的衍射光学纳米机电器件
- Patent Title: Diffractive optical nano-electro-mechanical device with reduced driving voltage
- Patent Title (中): 具有降低驱动电压的衍射光学纳米机电器件
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Application No.: US13297170Application Date: 2011-11-15
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Publication No.: US08643937B2Publication Date: 2014-02-04
- Inventor: Luc Haspeslagh , Xavier Rottenberg , Veronique Rochus
- Applicant: Luc Haspeslagh , Xavier Rottenberg , Veronique Rochus
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/10 ; G02B26/12 ; G02B26/08
Abstract:
A DND device is disclosed. In one aspect, the device includes a nano-mirror (21), and an actuating module configured to move the nano-mirror in an upward and/or downward position. The actuating module has a cantilever mounted to a fixed structure, and at least one first electrode for moving the cantilever in an upward and/or downward position. Such DND devices may be arranged in a 2D array.
Public/Granted literature
- US20120127558A1 DIFFRACTIVE OPTICAL NANO-ELECTRO-MECHANICAL DEVICE WITH REDUCED DRIVING VOLTAGE Public/Granted day:2012-05-24
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