Invention Grant
US08644451B2 X-ray generating apparatus and inspection apparatus using the same therein
有权
X射线发生装置和使用该装置的检查装置
- Patent Title: X-ray generating apparatus and inspection apparatus using the same therein
- Patent Title (中): X射线发生装置和使用该装置的检查装置
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Application No.: US13131611Application Date: 2010-03-26
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Publication No.: US08644451B2Publication Date: 2014-02-04
- Inventor: Shozo Aoki , Masahiro Nonoguchi
- Applicant: Shozo Aoki , Masahiro Nonoguchi
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2009-078590 20090327
- International Application: PCT/JP2010/002201 WO 20100326
- International Announcement: WO2010/109909 WO 20100930
- Main IPC: H01J35/18
- IPC: H01J35/18 ; G01N23/04

Abstract:
An X-ray generating apparatus is disclosed which includes a tube body having a vacuum interior, an electron source provided within the tube body to generate an electron beam, a target, within the tube body that is irradiated with the electron beam to generate an X-ray, and an X-ray window for taking out the X-ray generated outside of the tube body. A plurality of grooves are formed on a surface of a member building up the target. The grooves each have a fine width and are inclined by a predetermined angle (α), from a direction perpendicular to an elongating direction of the grooves, so that they bridge over the plural numbers of grooves. The X-ray generating apparatus is configured such that a multi-line X-ray generating from the plural numbers of multi-line targets, which are formed between the grooves, emits at a predetermined extraction angle (β), passing through the X-ray window. An inspection apparatus which includes the X-ray generating apparatus is also disclosed.
Public/Granted literature
- US20110235781A1 X-RAY GENERATING APPARATUS AND INSPECTION APPARATUS USING THE SAME THEREIN Public/Granted day:2011-09-29
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