Invention Grant
- Patent Title: Image processing method
- Patent Title (中): 图像处理方法
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Application No.: US13576574Application Date: 2011-03-08
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Publication No.: US08644637B2Publication Date: 2014-02-04
- Inventor: Takeo Suga
- Applicant: Takeo Suga
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2010-054583 20100311
- International Application: PCT/JP2011/055874 WO 20110308
- International Announcement: WO2011/111852 WO 20110915
- Main IPC: G06K9/40
- IPC: G06K9/40 ; G06K9/00

Abstract:
In a time-of-flight type, secondary ionization mass-spectrometry apparatus, spread of a primary beam irradiating a sample is calculated through a numeric or practical-experiment process, and the spread is used as a blurring function to restore an image to reduce blur. Provided is an image processing method of a mass-spectrum image derived by irradiating a surface of a sample with a converged short pulsed primary beam, while changing an irradiating position, to display two-dimensionally a signal intensity based on a ratio of mass to an electric charge relating to a mass spectrum, derived by a time-of-flight secondary ion mass spectrometer. The method includes the steps of: calculating a blurring function based on a shape of the primary beam incident on the surface of the sample; and restoring the mass-spectrum image based on the blurring function.
Public/Granted literature
- US20120301043A1 IMAGE PROCESSING METHOD Public/Granted day:2012-11-29
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