Invention Grant
- Patent Title: Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structures
- Patent Title (中): 用于确定周期性结构的电磁散射特性和结构参数的方法和装置
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Application No.: US12955463Application Date: 2010-11-29
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Publication No.: US08645109B2Publication Date: 2014-02-04
- Inventor: Remco Dirks , Irwan Dani Setija , Markus Gerardus Martinus Maria Van Kraaij , Martijn Constant Van Beurden
- Applicant: Remco Dirks , Irwan Dani Setija , Markus Gerardus Martinus Maria Van Kraaij , Martijn Constant Van Beurden
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G06F7/60
- IPC: G06F7/60 ; G06F17/10

Abstract:
Numerical calculation of electromagnetic scattering properties and structural parameters of periodic structures is disclosed. A reflection coefficient has a representation as a bilinear or sesquilinear form. Computations of reflection coefficients and their derivatives for a single outgoing direction can benefit from an adjoint-state variable. Because the linear operator is identical for all angles of incidence that contribute to the same outgoing wave direction, there exists a single adjoint-state variable that generates all reflection coefficients from all incident waves that contribute to the outgoing wave. This adjoint-state variable can be obtained by numerically solving a single linear system, whereas one otherwise would need to solve a number of linear systems equal to the number of angles of incidence.
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