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US08645109B2 Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structures 有权
用于确定周期性结构的电磁散射特性和结构参数的方法和装置

Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structures
Abstract:
Numerical calculation of electromagnetic scattering properties and structural parameters of periodic structures is disclosed. A reflection coefficient has a representation as a bilinear or sesquilinear form. Computations of reflection coefficients and their derivatives for a single outgoing direction can benefit from an adjoint-state variable. Because the linear operator is identical for all angles of incidence that contribute to the same outgoing wave direction, there exists a single adjoint-state variable that generates all reflection coefficients from all incident waves that contribute to the outgoing wave. This adjoint-state variable can be obtained by numerically solving a single linear system, whereas one otherwise would need to solve a number of linear systems equal to the number of angles of incidence.
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