Invention Grant
US08646111B2 Coupled mass-spring systems and imaging methods for scanning probe microscopy
失效
用于扫描探针显微镜的耦合质量弹簧系统和成像方法
- Patent Title: Coupled mass-spring systems and imaging methods for scanning probe microscopy
- Patent Title (中): 用于扫描探针显微镜的耦合质量弹簧系统和成像方法
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Application No.: US12223891Application Date: 2007-02-13
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Publication No.: US08646111B2Publication Date: 2014-02-04
- Inventor: Kimberly L. Turner , Benedikt Zeyen
- Applicant: Kimberly L. Turner , Benedikt Zeyen
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Berliner & Associates
- International Application: PCT/US2007/004126 WO 20070213
- International Announcement: WO2007/095360 WO 20070823
- Main IPC: G01Q30/00
- IPC: G01Q30/00

Abstract:
A novel way for constructing and operating scanning probe microscopes to dynamically measure material properties of samples, mainly their surface hardness, by separating the functions of actuation, indentation and sensing into separate dynamic components. The amplitude and phase shift of higher modes occurring at periodic indentations with the sample are characteristic values for different sample materials. A separate sensor cantilever, connected to the indentation probe tip, has the advantage of a high mechanical amplification of a desired higher mode while suppressing the actuation signal itself. The operational range of the sensor can be extended just by switching the actuation signal to another submultiple of the sensor cantilever's resonance frequency and/or by using more than one sensor cantilever for each indentation tip.
Public/Granted literature
- US20100257644A1 Coupled Mass-Spring Systems and Imaging Methods for Scanning Probe Microscopy Public/Granted day:2010-10-07
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