Invention Grant
- Patent Title: Vibrating micromechanical sensor of angular velocity
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Application No.: US13328453Application Date: 2011-12-16
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Publication No.: US08646333B2Publication Date: 2014-02-11
- Inventor: Petri Klemetti , Kaisa Nera , Antti Lipsanen , Anssi Blomqvist , Altti Torkkeli
- Applicant: Petri Klemetti , Kaisa Nera , Antti Lipsanen , Anssi Blomqvist , Altti Torkkeli
- Applicant Address: FI Vantaa
- Assignee: Murata Electronics Oy
- Current Assignee: Murata Electronics Oy
- Current Assignee Address: FI Vantaa
- Agency: Squire Sanders (US) LLP
- Priority: FI20075708 20071005
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01C19/00

Abstract:
The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.
Public/Granted literature
- US20120085168A1 VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY Public/Granted day:2012-04-12
Information query
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