Invention Grant
US08646913B2 Optical image measuring device and control method thereof 有权
光学图像测量装置及其控制方法

  • Patent Title: Optical image measuring device and control method thereof
  • Patent Title (中): 光学图像测量装置及其控制方法
  • Application No.: US13142938
    Application Date: 2009-12-07
  • Publication No.: US08646913B2
    Publication Date: 2014-02-11
  • Inventor: Takefumi Hayashi
  • Applicant: Takefumi Hayashi
  • Applicant Address: JP Tokyo
  • Assignee: Kabushiki Kaisha Topcon
  • Current Assignee: Kabushiki Kaisha Topcon
  • Current Assignee Address: JP Tokyo
  • Agency: Pearne & Gordon LLP
  • Priority: JP2009-000529 20090106
  • International Application: PCT/JP2009/006672 WO 20091207
  • International Announcement: WO2010/079550 WO 20100715
  • Main IPC: A61B3/14
  • IPC: A61B3/14 A61B3/00
Optical image measuring device and control method thereof
Abstract:
A low-coherence light is split into a signal light and a reference light. The optical path length of the reference light is switched to optical path lengths that correspond to a first depth zone and a second depth zone. When forming a tomographic image of the second depth zone, in an optical system that condenses the signal light to the first depth zone when a measured object and an objective lens are located at a predetermined working distance, while being positioned at the working distance, a depth zone switching lens that transitions the depth at which the signal light is condensed to the second depth zone is inserted.
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