Invention Grant
- Patent Title: Magnet bar support system
- Patent Title (中): 磁棒支撑系统
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Application No.: US12652619Application Date: 2010-01-05
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Publication No.: US08647486B2Publication Date: 2014-02-11
- Inventor: Leszek Malaszewski , James G. Rietzel
- Applicant: Leszek Malaszewski , James G. Rietzel
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
An apparatus and method for controlling local deposition rate in a physical vapor deposition process is provided. A magnet bar assembly is disposed inside a sputtering target. The magnet bar assembly comprises a magnet bar, a support member aligned with the magnet bar, and one or more sliding brackets that couple the support member to the magnet bar. Each sliding bracket compresses the magnet bar to the support member, allowing the use of spacers between the support member and the magnet bar to adjust local proximity of the magnet bar to the plasma bombarding the target.
Public/Granted literature
- US20100170780A1 MAGNET BAR SUPPORT SYSTEM Public/Granted day:2010-07-08
Information query
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