Invention Grant
- Patent Title: Two component etching
- Patent Title (中): 双组分刻蚀
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Application No.: US13375812Application Date: 2010-05-12
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Publication No.: US08647526B2Publication Date: 2014-02-11
- Inventor: Oliver Doll , Edward Plummer , Mark James , Ingo Koehler
- Applicant: Oliver Doll , Edward Plummer , Mark James , Ingo Koehler
- Applicant Address: DE Darmstadt
- Assignee: Merck Patent Gesellschaft mit Beschrankter Haftung
- Current Assignee: Merck Patent Gesellschaft mit Beschrankter Haftung
- Current Assignee Address: DE Darmstadt
- Agency: Millen, White, Zelano & Branigan, P.C.
- Priority: EP09007411 20090604
- International Application: PCT/EP2010/002949 WO 20100512
- International Announcement: WO2010/139390 WO 20101209
- Main IPC: C09K13/04
- IPC: C09K13/04 ; B44C1/22
Abstract:
The object of the present invention is a new inkjet printable etching composition comprising an etchant, which is activated by a second component. Thus, a further object is the use of this new composition in a process for the etching of surfaces semiconductor devices or surfaces of solar cell devices.
Public/Granted literature
- US20120085965A1 TWO COMPONENT ETCHING Public/Granted day:2012-04-12
Information query
