Invention Grant
- Patent Title: Polishing composition and polishing method using the same
- Patent Title (中): 抛光组合物和抛光方法使用相同
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Application No.: US12018672Application Date: 2008-01-23
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Publication No.: US08647527B2Publication Date: 2014-02-11
- Inventor: Kazutoshi Hotta , Kanji Kawata
- Applicant: Kazutoshi Hotta , Kanji Kawata
- Applicant Address: JP Kiyosu-shi
- Assignee: Fujimi Incorporated
- Current Assignee: Fujimi Incorporated
- Current Assignee Address: JP Kiyosu-shi
- Priority: JP2007-012164 20070123
- Main IPC: C09K13/08
- IPC: C09K13/08 ; C09K13/04 ; C09K13/06

Abstract:
A polishing composition contains a vanadate such as ammonium vanadate, sodium vanadate, and potassium vanadate and an oxygen donor such as hydrogen peroxide and ozone. It is preferable that the polishing composition further contains at least either one of abrasive grains and a pH adjusting agent. The polishing composition can be suitably used for polishing a silicon carbide wafer such as a hexagonal silicon carbide single crystal wafer.
Public/Granted literature
- US20080173843A1 POLISHING COMPOSITION AND POLISHING METHOD USING THE SAME Public/Granted day:2008-07-24
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