Invention Grant
US08647558B2 Method for manufacturing structure 有权
制造结构的方法

Method for manufacturing structure
Abstract:
A method for manufacturing a structure includes, in the following order, preparing a substrate having a positive-type photosensitive resin layer and an absorption layer stacked thereon in this order, the absorption layer being capable of absorbing a light having a photosensitive wavelength which the positive-type photosensitive resin senses; pressing a projecting portion of a mold into both the positive-type photosensitive resin layer and the absorption layer; separating the mold from both layers; irradiating the two layers with the light from an upper face side of both layers; removing the absorption layer; and developing the positive-type photosensitive resin layer.
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