Invention Grant
- Patent Title: Photosensitive resin composition, photosensitive dry film and method for forming pattern
- Patent Title (中): 感光树脂组合物,感光干膜和形成图案的方法
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Application No.: US13519418Application Date: 2010-12-27
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Publication No.: US08647806B2Publication Date: 2014-02-11
- Inventor: Akifumi Ueda , Hidetaka Nakagawara , Kazuo Watanabe , Shigeki Watanabe , Wei Jen Lan , Chao Wen Lin
- Applicant: Akifumi Ueda , Hidetaka Nakagawara , Kazuo Watanabe , Shigeki Watanabe , Wei Jen Lan , Chao Wen Lin
- Applicant Address: JP Koshigaya-shi TW Taoyuan Hsien JP Tokyo
- Assignee: Micro Process Inc,Everlight Chemical Industrial Corporation,Mitsubishi Rayon Co., Ltd.
- Current Assignee: Micro Process Inc,Everlight Chemical Industrial Corporation,Mitsubishi Rayon Co., Ltd.
- Current Assignee Address: JP Koshigaya-shi TW Taoyuan Hsien JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-297145 20091228
- International Application: PCT/JP2010/073525 WO 20101227
- International Announcement: WO2011/081127 WO 20110707
- Main IPC: G03F7/023
- IPC: G03F7/023 ; G03F7/30

Abstract:
The present invention is related to a photosensitive resin composition containing: a vinyl-based copolymer (I) obtained by polymerizing a monomer mixture containing a monomer (a) having a phenolic hydroxyl group and a carboxyl group-containing vinyl monomer (b); a quinonediazide compound (II) and a compound (III) represented by the following formula (5), and to a photosensitive dry film and a method for forming a patter by using the photosensitive resin composition.According to the present invention, it is possible to provide a photosensitive resin composition which can form a resist film in which the occurrence of crack is suppressed, the film reduction of the unexposed area is suppressed, and sensitivity and resolution are excellent, and to provide a photosensitive dry film and a method for forming a pattern by using the photosensitive resist composition [In the formula, Y is a straight or branched hydrocarbon group of 1 to 6 carbon atoms; 1 and m are respectively independently an integer of 1 to 3; n is 1 or 2; p and q are respectively independently 0 or 1.]
Public/Granted literature
- US20120301830A1 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE DRY FILM AND METHOD FOR FORMING PATTERN Public/Granted day:2012-11-29
Information query
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