Invention Grant
US08647812B2 Pattern forming method, chemical amplification resist composition and resist film
有权
图案形成方法,化学放大抗蚀剂组合物和抗蚀剂膜
- Patent Title: Pattern forming method, chemical amplification resist composition and resist film
- Patent Title (中): 图案形成方法,化学放大抗蚀剂组合物和抗蚀剂膜
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Application No.: US13636834Application Date: 2011-03-18
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Publication No.: US08647812B2Publication Date: 2014-02-11
- Inventor: Kana Fujii , Shinji Tarutani
- Applicant: Kana Fujii , Shinji Tarutani
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2010-067076 20100323; JP2011-031437 20110216
- International Application: PCT/JP2011/057499 WO 20110318
- International Announcement: WO2011/118824 WO 20110929
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/028 ; G03F7/40

Abstract:
A pattern forming method comprising (i) a step of forming a film from a chemical amplification resist composition, (ii) a step of exposing the film, and (iii) a step of developing the exposed film by using an organic solvent-containing developer, wherein the resist composition contains (A) a resin capable of increasing the polarity to decrease the solubility for an organic solvent-containing developer by the action of an acid, (B) at least one kind of a compound capable of generating a sulfonic acid represented by the specific formula upon irradiation with an actinic ray or radiation, and (C) a solvent.
Public/Granted literature
- US20130011619A1 PATTERN FORMING METHOD, CHEMICAL AMPLIFICATION RESIST COMPOSITION AND RESIST FILM Public/Granted day:2013-01-10
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