Invention Grant
- Patent Title: Vertical gate LDMOS device
- Patent Title (中): 垂直门LDMOS器件
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Application No.: US13572428Application Date: 2012-08-10
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Publication No.: US08647950B2Publication Date: 2014-02-11
- Inventor: Marco A. Zuniga , Yang Lu , Badredin Fatemizadeh , Jayasimha Prasad , Amit Paul , Jun Ruan
- Applicant: Marco A. Zuniga , Yang Lu , Badredin Fatemizadeh , Jayasimha Prasad , Amit Paul , Jun Ruan
- Applicant Address: US CA Fremont
- Assignee: Volterra Semiconductor Corporation
- Current Assignee: Volterra Semiconductor Corporation
- Current Assignee Address: US CA Fremont
- Agency: Fish & Richardson P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method of fabricating a vertical gate region in LDMOS transistor includes depositing a first masking layer on an n-well region implanted on a substrate, patterning the first masking layer to define an area, depositing a second masking layer over the area, etching through the second masking layer in a first portion of the area to expose the n-well region, and etching the exposed n-well region to form a first trench. The first trench, extending from a surface of the n-well region to a first depth, is filled with an oxide. The second masking layer is etched through in a second portion of the area to expose the n-well region. A second trench is formed in the n-well, the second trench extending from the surface to a second depth, less than the first depth. An asymmetric vertical gate is formed by filling the second trench with a conductive material.
Public/Granted literature
- US20130115744A1 Vertical Gate LDMOS Device Public/Granted day:2013-05-09
Information query
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