Invention Grant
US08647965B2 Radiographic image detector, method of producing the same, and protective member
失效
射线照相图像检测器及其制造方法以及保护部件
- Patent Title: Radiographic image detector, method of producing the same, and protective member
- Patent Title (中): 射线照相图像检测器及其制造方法以及保护部件
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Application No.: US12967184Application Date: 2010-12-14
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Publication No.: US08647965B2Publication Date: 2014-02-11
- Inventor: Keiichiro Sato
- Applicant: Keiichiro Sato
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2010-017460 20100128
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46 ; H01L27/146

Abstract:
A method of producing a radiographic image detector includes: preparing a thin-film transistor substrate comprising an insulating substrate and a thin-film transistor that is disposed on a surface of the insulating substrate at a first side; attaching, to the thin-film transistor substrate, a protective member comprising a protective member support and an adhesive layer that includes conductive particles and that is disposed on the protective member support, such that the adhesive layer and a surface of the thin-film transistor substrate at the first side contact each other; polishing a surface of the thin-film transistor substrate at a second side opposite to the first side, after the attaching of the protective member; separating and removing the protective member from the thin-film transistor substrate after the polishing; and providing a scintillator layer on a surface of the thin-film transistor substrate at the first side, after the removing of the protective member.
Public/Granted literature
- US20110180890A1 RADIOGRAPHIC IMAGE DETECTOR, METHOD OF PRODUCING THE SAME, AND PROTECTIVE MEMBER Public/Granted day:2011-07-28
Information query
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