Invention Grant
US08648604B2 Ionization gauge with operational parameters and geometry designed for high pressure operation 有权
具有操作参数和几何设计用于高压操作的电离计

Ionization gauge with operational parameters and geometry designed for high pressure operation
Abstract:
An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
Information query
Patent Agency Ranking
0/0