Invention Grant
- Patent Title: Ionization gauge with operational parameters and geometry designed for high pressure operation
- Patent Title (中): 具有操作参数和几何设计用于高压操作的电离计
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Application No.: US12860050Application Date: 2010-08-20
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Publication No.: US08648604B2Publication Date: 2014-02-11
- Inventor: Gerardo A. Brucker
- Applicant: Gerardo A. Brucker
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L21/30
- IPC: G01L21/30

Abstract:
An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
Public/Granted literature
- US20110062961A1 Ionization Gauge With Operational Parameters And Geometry Designed For High Pressure Operation Public/Granted day:2011-03-17
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