Invention Grant
- Patent Title: Oscillator having a plurality of switchable MEMS vibrators
- Patent Title (中): 振荡器具有多个可切换MEMS振动器
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Application No.: US13444144Application Date: 2012-04-11
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Publication No.: US08648663B2Publication Date: 2014-02-11
- Inventor: Aritsugu Yajima
- Applicant: Aritsugu Yajima
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2011-088915 20110413
- Main IPC: H03B5/30
- IPC: H03B5/30 ; H01L41/00 ; H03H9/205

Abstract:
An oscillator includes: a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other; an amplifier circuit having an input terminal and an output terminal; a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the one of the MEMS vibrators and the output terminal to each other; a signal reception terminal adapted to receive a switching signal used to switch a state of the connection circuit; and a switching circuit adapted to make the connection circuit switch the MEMS vibrator to be connected to the amplifier circuit based on the switching signal, wherein the MEMS vibrators are housed in an inside of a cavity, and the signal reception terminal is disposed outside the cavity.
Public/Granted literature
- US20120262243A1 OSCILLATOR Public/Granted day:2012-10-18
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