Invention Grant
US08648977B2 Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
有权
用于提供具有用于室门的隔离密封表面的浮动密封件的方法和装置
- Patent Title: Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
- Patent Title (中): 用于提供具有用于室门的隔离密封表面的浮动密封件的方法和装置
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Application No.: US11194503Application Date: 2005-08-01
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Publication No.: US08648977B2Publication Date: 2014-02-11
- Inventor: Billy C. Leung , David E. Berkstresser , Shinichi Kurita
- Applicant: Billy C. Leung , David E. Berkstresser , Shinichi Kurita
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, INC.
- Current Assignee: Applied Materials, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: G02F1/1333
- IPC: G02F1/1333
Abstract:
A method is provided that includes isolating a sealing surface from a chamber wall of a chamber and sealing the chamber between the sealing surface and the chamber wall. An apparatus is provided that includes a chamber wall section prone to deflection, a stationary section providing a sealing surface, and a flexible bellows attached to the chamber wall section and the stationary section. A system is also provided that includes a chamber including a chamber wall having an opening, a door disposed to seal the opening, a sealing surface adjacent the opening and isolated from the chamber wall, and a seal between the sealing surface and the chamber wall. Numerous other aspects are provided.
Public/Granted literature
- US20060028596A1 Methods and apparatus for providing a floating seal for chamber doors Public/Granted day:2006-02-09
Information query
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