Invention Grant
- Patent Title: Shape determining device
- Patent Title (中): 形状确定装置
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Application No.: US13138294Application Date: 2010-01-28
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Publication No.: US08649019B2Publication Date: 2014-02-11
- Inventor: Masato Kannaka , Eiji Takahashi , Masakazu Kajita , Hideki Matsuoka , Hidetoshi Tsunaki , Noritaka Morioka , Kazuhiko Tahara , Takuya Atsumi
- Applicant: Masato Kannaka , Eiji Takahashi , Masakazu Kajita , Hideki Matsuoka , Hidetoshi Tsunaki , Noritaka Morioka , Kazuhiko Tahara , Takuya Atsumi
- Applicant Address: JP Kobe-shi, Hyogo JP Kobe-shi, Hyogo
- Assignee: Kobe Steel, Ltd.,Kobelco Research Institute, Inc.
- Current Assignee: Kobe Steel, Ltd.,Kobelco Research Institute, Inc.
- Current Assignee Address: JP Kobe-shi, Hyogo JP Kobe-shi, Hyogo
- Agency: Stites & Harbison PLLC
- Agent Juan Carlos A. Marquez, Esq.; Nicholas B. Trenkle
- Priority: JPP.2009-016396 20090128; JPP.2009-135973 20090605
- International Application: PCT/JP2010/051099 WO 20100128
- International Announcement: WO2010/087390 WO 20100805
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A shape determining device includes first and second homodyne interferometers respectively provided for front and back surfaces of an object to be measured and a thickness distribution calculator that calculates a thickness distribution of the object based on intensities of first and second interference light beams respectively detected by the first and second homodyne interferometers for the front and back surfaces of the object at a plurality of measurement sites. The thickness distribution calculator calculates, for each interference light beam for which the intensity is detected by the first and second homodyne interferometers, a phase difference between the polarization components of a corresponding reference light beam and a corresponding object light beam in a corresponding non-interference light beam based on the intensity of the interference light beam, and calculates the thickness distribution based on a distribution of the calculated phase differences.
Public/Granted literature
- US20120002213A1 SHAPE DETERMINING DEVICE Public/Granted day:2012-01-05
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