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US08649096B2 Fine grating and mold therefor 有权
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Fine grating and mold therefor
Abstract:
This invention provides a mold with which a two-dimensional subwavelength grating can be produced with a higher percentage transfer by injection molding and a two-dimensional subwavelength grating having a high aspect ratio produced with such a mold. The mold for a fine grating according to the present invention has protrusion parts (107) arranged at an interval on the bottom face (103) of a cavity, wherein the interval is a distance between centers of the protrusion parts and a period of the fine grating smaller than wavelengths of visible lights. In one embodiment, a cross-section of the protrusion parts, parallel to the bottom face of the cavity decreases with height along the protrusion parts and a decreasing rate of the cross-section increases with height along the protrusions.
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