Invention Grant
US08650660B2 Method and apparatus of using peak force tapping mode to measure physical properties of a sample 有权
使用峰值力攻丝模式测量样品的物理性质的方法和装置

Method and apparatus of using peak force tapping mode to measure physical properties of a sample
Abstract:
An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.
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