A coordinates measuring head unit is provided, which is compact, inexpensive, and capable of performing high-precision measurements at high speeds, and facilitates, for example, measurements conducted on machine tools or in-situ measurements on transport lines. The head unit includes: drive means (an X-axis drive section, a Y-axis drive section, and a Z-axis drive section), an integrated housing for accommodating the drive means, and fixture means (fixture surface). The drive means allows a probe to be moved by computer numerical control along a plurality of drive axis, which are orthogonal to each other, and abut against a measuring target to measure the dimensions of the measuring target. The fixture means is provided on one of side surfaces of the housing to attach one of the drive means to a support (a support on a stand secured to a base).