Invention Grant
US08650769B2 Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate 有权
包括附接到基板的测量刻度的组件和用于将测量刻度保持在基板上的方法

Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate
Abstract:
An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.
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