Invention Grant
US08650769B2 Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate
有权
包括附接到基板的测量刻度的组件和用于将测量刻度保持在基板上的方法
- Patent Title: Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate
- Patent Title (中): 包括附接到基板的测量刻度的组件和用于将测量刻度保持在基板上的方法
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Application No.: US13260891Application Date: 2010-02-23
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Publication No.: US08650769B2Publication Date: 2014-02-18
- Inventor: Peter Speckbacher , Josef Weidmann , Wolfgang Holzapfel
- Applicant: Peter Speckbacher , Josef Weidmann , Wolfgang Holzapfel
- Applicant Address: DE Traunreut
- Assignee: Johannes Heidenhain GmbH
- Current Assignee: Johannes Heidenhain GmbH
- Current Assignee Address: DE Traunreut
- Agency: Brinks Gilson & Lione
- Priority: DE102009002142 20090402
- International Application: PCT/EP2010/052239 WO 20100223
- International Announcement: WO2010/112269 WO 20101007
- Main IPC: G01D5/347
- IPC: G01D5/347 ; G01D5/26 ; G01B11/02

Abstract:
An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.
Public/Granted literature
Information query
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