Invention Grant
US08650963B2 Electrostatically coupled pressure sensor 有权
静电耦合压力传感器

Electrostatically coupled pressure sensor
Abstract:
A disclosed pressure-responsive sensor includes a flexible element contained within an enclosure and a membrane configured to exert an electrostatic force on the flexible element to cause the flexible element to respond to pressure variations on the membrane. A disclosed pressure-sensing method includes electrostatically coupling a membrane to a flexible element contained within an enclosure to transfer a pressure response of the membrane to the flexible element. Motion of the flexible element is converted into a pressure signal.
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