Invention Grant
- Patent Title: Method of fabricating thin film transistor
- Patent Title (中): 制造薄膜晶体管的方法
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Application No.: US11760869Application Date: 2007-06-11
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Publication No.: US08652885B2Publication Date: 2014-02-18
- Inventor: Byoung-Deog Choi , Sung-Sik Bae , Won-Sik Kim
- Applicant: Byoung-Deog Choi , Sung-Sik Bae , Won-Sik Kim
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR2003-27339 20030429
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of fabricating a thin film transistor includes forming an active layer on an insulating substrate; forming a gate insulation film on the insulating substrate; forming source, drain, and body contact regions which are separated by a channel region in the active layer; forming a gate on the gate insulation film; forming an interlayer insulation film on the insulating substrate; and forming source and drain electrodes electrically connected with the source and drain regions, respectively, wherein a voltage is applied to the channel region of the active layer through the body contact region, and the body contact region is connected to the source or drain electrode.
Public/Granted literature
- US20070231977A1 METHOD OF FABRICATING THIN FILM TRANSISTOR Public/Granted day:2007-10-04
Information query
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