Invention Grant
- Patent Title: Semiconductor memory device and fabrication process thereof
-
Application No.: US13726940Application Date: 2012-12-26
-
Publication No.: US08652896B2Publication Date: 2014-02-18
- Inventor: Makoto Yasuda
- Applicant: Fujitsu Semiconductor Limited
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Semiconductor Limited
- Current Assignee: Fujitsu Semiconductor Limited
- Current Assignee Address: JP Yokohama
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-042498 20070222
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
A SRAM includes a first CMOS inverter of first and second MOS transistors connected in series, a second CMOS inverter of third and fourth MOS transistors connected in series and forming a flip-flop circuit together with the first CMOS inverter, and a polysilicon resistance element formed on a device isolation region, each of the first and third MOS transistors is formed in a device region of a first conductivity type and includes a second conductivity type drain region at an outer side of a sidewall insulation film of the gate electrode with a larger depth than a drain extension region thereof, wherein a source region is formed deeper than a drain extension region, the polysilicon gate electrode has a film thickness identical to a film thickness of the polysilicon resistance element, the source region and the polysilicon resistance element are doped with the same dopant element.
Public/Granted literature
- US20130114333A1 SEMICONDUCTOR MEMORY DEVICE AND FABRICATION PROCESS THEREOF Public/Granted day:2013-05-09
Information query
IPC分类: