Invention Grant
- Patent Title: Spectroscopy technique using merged spectral data
- Patent Title (中): 使用合并光谱数据的光谱技术
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Application No.: US13946755Application Date: 2013-07-19
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Publication No.: US08653457B2Publication Date: 2014-02-18
- Inventor: Sander Richard Marie Stoks
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Priority: EP12177454 20120723; EP13176233 20130716
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G21K7/00

Abstract:
A method of examining a sample using a spectroscopic apparatus, comprising the following steps: Mounting the sample on a sample holder; Directing a focused input beam of radiation onto a location on the sample, thereby producing an interaction that causes a flux of stimulated photonic radiation to emanate from said location; Examining said flux using a multi-channel photon-counting detector, thus accruing a measured spectrum for said location; Automatically repeating said directing and examining steps for a series of successive locations on the sample, which method comprises the following steps: Choosing a beam parameter of the input beam that will influence a magnitude of said flux of stimulated photonic radiation; For each location within a first set of locations on the sample, accruing a spectrum using a first value of said beam parameter; For each location within a second set of locations on the sample, accruing a spectrum using a second value of said beam parameter, different from said first value.
Public/Granted literature
- US20140021346A1 Spectroscopy Technique Using Merged Spectral Data Public/Granted day:2014-01-23
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