Invention Grant
- Patent Title: Mask manufacturing device
- Patent Title (中): 面膜制造装置
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Application No.: US13768221Application Date: 2013-02-15
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Publication No.: US08653483B2Publication Date: 2014-02-18
- Inventor: Masamitsu Itoh
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2008-003504 20080110
- Main IPC: A61N5/00
- IPC: A61N5/00

Abstract:
According to one embodiment, a mask manufacturing device includes a positional-deviation calculating unit that acquires positional deviation information between an actual position of a pattern formed on a mask substrate and a design position decided at the time of designing the pattern to a predetermined area of a square on the mask substrate; an irradiating-condition calculating unit that calculates an irradiating condition including an irradiating amount and an irradiating position of radiation to correct the positional deviation calculated to the predetermined area of a square on the mask substrate by using positional-deviation correction information, which indicates a relationship between the irradiating amount and the irradiating position of the radiation to the mask substrate and a pattern position change after irradiation of the radiation; and an irradiating unit that irradiates the mask substrate with the radiation under the irradiating condition calculated by the irradiating-condition calculating unit.
Public/Granted literature
- US20130153791A1 Mask Manufacturing Device Public/Granted day:2013-06-20
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