Invention Grant
- Patent Title: Method for 1/F noise reduction in NMOS devices
- Patent Title (中): NMOS器件中1 / F降噪的方法
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Application No.: US13523349Application Date: 2012-06-14
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Publication No.: US08653607B2Publication Date: 2014-02-18
- Inventor: Alwin James Tsao , Purushothaman Srinivasan
- Applicant: Alwin James Tsao , Purushothaman Srinivasan
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234

Abstract:
An integrated circuit, in which a minimum gate length of low-noise NMOS transistors is less than twice a minimum gate length of logic NMOS transistors, is formed by: forming gates of the low-noise NMOS transistors concurrently with gates of the logic NMOS transistors, forming a low-noise NMDD implant mask which exposes the low-noise NMOS transistors and covers the logic NMOS transistors and logic PMOS transistors, ion implanting n-type NMDD dopants and fluorine into the low-noise NMOS transistors and limiting p-type halo dopants to less than 20 percent of a corresponding logic NMOS halo dose, removing the low-noise NMDD implant mask, forming a logic NMDD implant mask which exposes the logic NMOS transistors and covers the low-noise NMOS transistors and logic PMOS transistors, ion implanting n-type NMDD dopants and p-type halo dopants, but not implanting fluorine, into the logic NMOS transistors, and removing the logic NMDD implant mask.
Public/Granted literature
- US20120319210A1 METHOD FOR 1/F NOISE REDUCTION IN NMOS DEVICES Public/Granted day:2012-12-20
Information query
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