Invention Grant
- Patent Title: Electromechanical transducer and method of manufacturing the same
- Patent Title (中): 机电换能器及其制造方法
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Application No.: US13248440Application Date: 2011-09-29
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Publication No.: US08653613B2Publication Date: 2014-02-18
- Inventor: Kazutoshi Torashima , Takahiro Akiyama
- Applicant: Kazutoshi Torashima , Takahiro Akiyama
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2010-232046 20101015
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/84
Abstract:
An electromechanical transducer includes multiple elements each including at least one cellular structure, the cellular structure including: a semiconductor substrate, a semiconductor diaphragm, and a supporting portion for supporting the diaphragm so that a gap is formed between one surface of the substrate and the diaphragm. The elements are separated from one another at separating locations of a semiconductor film including the diaphragm. Each of the elements includes in a through hole passing through a first insulating layer including the supporting portion and the semiconductor substrate: a conductor which is connected to the semiconductor film including the diaphragm; and a second insulating layer for insulating the conductor from the semiconductor substrate.
Public/Granted literature
- US20120091543A1 ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2012-04-19
Information query
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