Invention Grant
- Patent Title: Zigzag pattern for TSV copper adhesion
- Patent Title (中): Zigzag图案为TSV铜附着力
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Application No.: US12245505Application Date: 2008-10-03
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Publication No.: US08653648B2Publication Date: 2014-02-18
- Inventor: Chih-Hua Chen , Chen-Shien Chen , Chen-Cheng Kuo , Wen-Wei Shen
- Applicant: Chih-Hua Chen , Chen-Shien Chen , Chen-Cheng Kuo , Wen-Wei Shen
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L23/04
- IPC: H01L23/04

Abstract:
A system and method for forming a TSV contact is presented. A preferred embodiment includes a TSV in contact with a portion of the uppermost metal layer of a semiconductor die. The interface between the TSV conductor and the contact pad is preferably characterized by a non-planar zigzag pattern that forms a grid pattern of contacts. Alternatively, the contacts may form a plurality of metal lines that make contact with the contact pad.
Public/Granted literature
- US20100084747A1 Zigzag Pattern for TSV Copper Adhesion Public/Granted day:2010-04-08
Information query
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