Invention Grant
US08654438B2 Master oscillator-power amplifier drive laser with pre-pulse for EUV light source
有权
主振荡器 - 功率放大器驱动具有用于EUV光源的预脉冲的激光器
- Patent Title: Master oscillator-power amplifier drive laser with pre-pulse for EUV light source
- Patent Title (中): 主振荡器 - 功率放大器驱动具有用于EUV光源的预脉冲的激光器
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Application No.: US13077236Application Date: 2011-03-31
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Publication No.: US08654438B2Publication Date: 2014-02-18
- Inventor: Kai-Chung Hou , Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov
- Applicant: Kai-Chung Hou , Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: Cymer, LLC
- Main IPC: H01S3/03
- IPC: H01S3/03
Abstract:
A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ1 and λ2, with λ1≠λ2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ1; a main pulse seed laser generating a laser output having wavelength, λ2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.
Public/Granted literature
- US20110317256A1 MASTER OSCILLATOR-POWER AMPLIFIER DRIVE LASER WITH PRE-PULSE FOR EUV LIGHT SOURCE Public/Granted day:2011-12-29
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