Invention Grant
- Patent Title: Wafer cassette transportation method and system thereof
- Patent Title (中): 晶圆盒输送方法及其系统
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Application No.: US12243323Application Date: 2008-10-01
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Publication No.: US08655483B2Publication Date: 2014-02-18
- Inventor: Chin-Hsiao Chuang , Yu-Kun Chen
- Applicant: Chin-Hsiao Chuang , Yu-Kun Chen
- Applicant Address: TW Taoyuan County
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW97128294A 20080725
- Main IPC: G06F7/00
- IPC: G06F7/00

Abstract:
A wafer cassette transportation method includes the steps: (a) Provide a monitoring system, overhead platforms, a detection system, and a plurality of transportation systems; (b) The detection system detects whether or not any overhead platform has a wafer cassette and generates and transmits first signals to the monitoring system; (c) The monitoring system reads the first signals and instructs one of the transportation systems to move the wafer cassette to an empty overhead platform; (d) The detection system detects whether or not any overhead platform has a wafer cassette and generates and transmits second signals to the monitoring system; and (e) The monitoring system reads the second signals and instructs another transportation system to move the wafer cassette away from the overhead platform, so as to enhance the transportation speed of the wafer cassette and lower the manufacturing cost. The present invention further provides a wafer cassette transportation system.
Public/Granted literature
- US20100023158A1 WAFER CASSETTE TRANSPORTATION METHOD AND SYSTEM THEREOF Public/Granted day:2010-01-28
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