Invention Grant
US08656336B2 Pattern based method for identifying design for manufacturing improvement in a semiconductor device
失效
用于识别半导体器件中制造改进设计的基于图案的方法
- Patent Title: Pattern based method for identifying design for manufacturing improvement in a semiconductor device
- Patent Title (中): 用于识别半导体器件中制造改进设计的基于图案的方法
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Application No.: US13405662Application Date: 2012-02-27
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Publication No.: US08656336B2Publication Date: 2014-02-18
- Inventor: Piyush Pathak , Shobhit Malik , Sriram Madhavan
- Applicant: Piyush Pathak , Shobhit Malik , Sriram Madhavan
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A method includes receiving a design layout file for an integrated circuit device in a computing apparatus. The design layout file specifies dimensions of a plurality of features. Outer markers are generated in the computing apparatus for at least a subset of the features based on the proximity of the features to one another and spacing requirements. Features are identified in the computing apparatus where the associated outer marker has at least one dimension greater than the dimensions specified for the feature.
Public/Granted literature
- US20130227498A1 PATTERN BASED METHOD FOR IDENTIFYING DESIGN FOR MANUFACTURING IMPROVEMENT IN A SEMICONDUCTOR DEVICE Public/Granted day:2013-08-29
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