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US08656336B2 Pattern based method for identifying design for manufacturing improvement in a semiconductor device 失效
用于识别半导体器件中制造改进设计的基于图案的方法

Pattern based method for identifying design for manufacturing improvement in a semiconductor device
Abstract:
A method includes receiving a design layout file for an integrated circuit device in a computing apparatus. The design layout file specifies dimensions of a plurality of features. Outer markers are generated in the computing apparatus for at least a subset of the features based on the proximity of the features to one another and spacing requirements. Features are identified in the computing apparatus where the associated outer marker has at least one dimension greater than the dimensions specified for the feature.
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