Invention Grant
- Patent Title: Method of fabricating an electromechanical component using graphene
- Patent Title (中): 使用石墨烯制造机电元件的方法
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Application No.: US12884871Application Date: 2010-09-17
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Publication No.: US08656584B2Publication Date: 2014-02-25
- Inventor: Jean-Christophe Gabriel , Philippe Andreucci , Thomas Ernst , Thierry Poiroux
- Applicant: Jean-Christophe Gabriel , Philippe Andreucci , Thomas Ernst , Thierry Poiroux
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0956426 20090918
- Main IPC: H05K3/02
- IPC: H05K3/02 ; H05K3/10
Abstract:
Method of fabricating an electro-mechanical microsystem provided with at least one fixed part comprising a bar, and at least one mobile part in rotation around at least one portion of said bar, the method comprising the steps of: a) formation, inside a layer of at least one given material resting on a support, of at least one bar, b) formation around the bar of at least one first graphene sheet, and of a least one second graphene sheet, separated from the first sheet and mobile with respect to the first sheet.
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