Invention Grant
US08657584B2 Apparatus and method for tuning pump speed 有权
调速泵速度的装置和方法

Apparatus and method for tuning pump speed
Abstract:
An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.
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