Invention Grant
- Patent Title: Bumping process and structure thereof
- Patent Title (中): 冲击过程及其结构
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Application No.: US13753936Application Date: 2013-01-30
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Publication No.: US08658528B2Publication Date: 2014-02-25
- Inventor: Chih-Ming Kuo , Yie-Chuan Chiu , Lung-Hua Ho
- Applicant: Chipbond Technology Corporation
- Applicant Address: TW Hsinchu
- Assignee: Chipbond Technology Corporation
- Current Assignee: Chipbond Technology Corporation
- Current Assignee Address: TW Hsinchu
- Agency: Jackson IPG PLLC
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A bumping process includes providing a silicon substrate; forming a titanium-containing metal layer on silicon substrate, the titanium-containing metal layer comprises a plurality of first areas and a plurality of second areas; forming a first photoresist layer on titanium-containing metal layer; patterning the first photoresist layer to form a plurality of first opening slots; forming a plurality of copper bumps within first opening slots, said copper bump comprises a first top surface and a first ring surface; removing the first photoresist layer; forming a second photoresist layer on titanium-containing metal layer; patterning the second photoresist layer to form a plurality of second opening slots; forming a plurality of bump isolation layers at spaces, the first top surfaces and the first ring surfaces; forming a plurality of connective layers on bump isolation layers; removing the second photoresist layer, removing the second areas to form an under bump metallurgy layer.
Public/Granted literature
- US20130196498A1 BUMPING PROCESS AND STRUCTURE THEREOF Public/Granted day:2013-08-01
Information query
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