Invention Grant
- Patent Title: MEMS component having a diaphragm structure
- Patent Title (中): 具有隔膜结构的MEMS部件
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Application No.: US13350350Application Date: 2012-01-13
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Publication No.: US08659100B2Publication Date: 2014-02-25
- Inventor: Jochen Zoellin , Ricardo Ehrenpfordt , Ulrike Scholz
- Applicant: Jochen Zoellin , Ricardo Ehrenpfordt , Ulrike Scholz
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102011005676 20110317
- Main IPC: H04R23/00
- IPC: H04R23/00 ; G01L9/00

Abstract:
A wafer-level-based packaging concept for MEMS components having at least one diaphragm structure formed in the component front side is described, according to which an interposer is connected to the front side of the MEMS component, which has at least one passage aperture as an access opening to the diaphragm structure of the MEMS component and which is provided with electrical through contacts so that the MEMS component is electrically contactable via the interposer. The cross-sectional area of the at least one passage aperture in the interposer is to be designed as significantly smaller than the lateral extension of the diaphragm structure of the MEMS component. The at least one passage aperture opens into a cavity between the diaphragm structure and the interposer.
Public/Granted literature
- US20120235256A1 COMPONENT Public/Granted day:2012-09-20
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